** MAIN FEATURES **
The JEOL JSM-6490LV is a high-performance scanning electron microscope (SEM) designed for high- and low-vacuum operation. It provides a resolution down to 3.0 nm and accommodates large samples up to 8 inches in diameter. Typical applications include materials science, semiconductors, and biological specimens requiring variable pressure observation. The system runs on software version 8.27. It is equipped with a BRUKER Quantax 250 EDS microanalysis system (software version 1.9.4).
** BEAM **
– Emitter type: Tungsten hairpin filament (precentered)
– Accelerating voltage range: 0.3 to 30 kV (55 steps)
– Probe current: Approx. 1 pA to 1 μA
** RESOLUTION **
– HV mode: 3.0 nm at 30 kV (WD 8 mm), 8.0 nm at 3 kV (WD 6 mm), 15.0 nm at 1 kV (WD 6 mm)
– LV mode (BEI): 4.0 nm at 30 kV (WD 5 mm)
** DETECTORS **
– Secondary electron detector: E.T. detector (collector, scintillator, light guide, photomultiplier tube)
– Backscattered electron detector: Semiconductor (P-N junction) detector
– EDS: BRUKER Quantax 250 (software version 1.9.4)
** STAGE **
– 5-axis motorized eucentric stage (X, Y, Z, Tilt, Rotation)
– X: 125 mm, Y: 100 mm, Z: WD 5–80 mm
– Tilt: -10° to +90°
– Rotation: 360° continuous
– Maximum specimen size: 8-inch diameter, 1 kg max weight
** ACCESSORIES **
– Dual rotary pumps (100 L/min each)
– Oil diffusion pump (4-inch, 420 L/s, water-cooled)
– Foreline trap and Pirani pressure gauge
– Computer-controlled vacuum system
– Standard specimen holders
** CONDITION **
Installed and working. The last use was at the end of May 2025. Since then, there has been no technician in the laboratory.
