** MAIN FEATURES **
– High-resolution SEM system, variable pressure instrument with large chamber and retractable STEM detector.
– Suitable applications includes nanoscale prototyping, machining, characterization, and analysis.
– Typical fields: materials science, semiconductors, and advanced microscopy labs.
** BEAM **
– Emitter type: Thermal/Schottky field emission gun.
– Acceleration voltage range: 200V – 30KV
** RESOLUTION **
– Point resolution: ≤ 1.0 nm at 15 kV (WD = 4.6 mm); ≤ 1.8 nm at 1 kV (WD = 1 mm).
– Line resolution: ≈ 0.85 nm (edge) at 15 kV and ≈ 2.1 nm (edge) at 1 kV
– OEM STEM mode resolution can be as low as 1 nm.
** DETECTORS **
– In-lens SE detector (TLD).
– Everhardt-Thornley SED
– BSE detector.
– LVD detector.
– Retractable STEM detector.
** STAGE **
– 5-axis motorized stage.
– Large chamber. X-Y travel 150x150mm. Max clearance 55 mm.
– Tilt: -10 to +60 deg
– Step: 100nm
** ACCESSORIES **
– Turbo pumped vacuum system.
– Vacuum pump included
– No Chiller, No Compressor. Both can be added separately.
** CONDITION **
– System fully functional.
– Refurbishment: replacement of all vacuum hoses, alignment, vacuum pump rebuild, and complete system check.
