** MAIN FEATURES **
The FEI Quanta 3D is a dual-beam FIB-SEM combining a focused ion beam with a field emission scanning electron microscope. It supports imaging, micro- and nano-fabrication, and analytical applications in materials science, semiconductors, and life sciences. The system operates under variable pressure, enabling the observation of both conductive and non-conductive samples.
** BEAM **
– Electron beam: FEG (Field Emission Gun)
– Ion beam: Gallium (Ga) ion source
– Electron beam 200 V to 30 kV
– Ion beam 2kV to 30 kV
** RESOLUTION **
– SEM resolution: 1.2 nm at 30 kV (SE), 2.9 nm at 1 kV
– FIB resolution: 7 nm at 30 kV
** DETECTORS **
– ETD (Everhart-Thornley Detector)
– BSED (Backscatter Detector)
– LVSED (Low Vacuum SE Detector)
– GAD (Gaseous Analytical Detector)
– GSED (Gaseous SE Detector)
– STEM detector
– EDS (EDAX Elect 30, installed 2019)
– EBSD (Ametek, installed 2014)
** STAGE **
– 5-axis motorized stage
– Equipped with cooling and heating capabilities
** ACCESSORIES **
– Omniprobe micromanipulator
– Gas injection and deposition systems
– Chiller
** CONDITION **
System is powered down. The shutdown was due to depleted sources and replacement plans. All components were functional at shutdown. Ion getter pumps likely need replacement. The system is packed.
We can offer this tool as is or reconditioned, delivered, installed, up and running.
