** MAIN FEATURES **
The FEI Strata 400 DualBeam is a fully digital Field Emission Scanning Electron Microscope (FE-SEM) combined with a Focused Ion Beam (FIB) column. It is designed for high-throughput cross-sectioning, precise sample preparation, and advanced analytical tasks in materials science, semiconductors, and failure analysis. The system integrates both high-resolution electron and ion optics with automation features and advanced gas injection capabilities.
** BEAM **
– Electron emitter: Schottky field emitter (Sirion type)
– Ion source: Liquid gallium ion source (Sidewinder column)
– Electron acceleration voltage: 200 V to 30 kV
– Ion acceleration voltage: 2 kV to 30 kV
– Beam coincidence point: 5 mm working distance
** RESOLUTION **
– Electron resolution: 1.0 nm @ 15 kV, 2.5 nm (1.9 nm achievable) @ 1 kV
– Ion resolution: 7.0 nm @ 30 kV
** DETECTORS **
– In-lens SE and BSE detectors
– Everhart-Thornley SE detector (ETD)
– Channel electron multiplier (CDEM) detector for secondary and secondary ion imaging
– “Integrated IR-CCD in-chamber camera”
** STAGE **
– 5-axis motorized stage (x, y, z, rotate, tilt)
– Travel range: 100 mm in x and y, 20 mm in z
– Tilt range: -10° to +60°
– Stage repeatability: 0.5 µm
– Includes multi-stub, single-stub, and TEM specimen holders
** ACCESSORIES **
– Four installed Gas Injection Systems: Pt, IEE, IDep2, W
– No chiller included
– Integrated loadlock system
– “Oil-free vacuum with Edwards XDS10 scroll pump”
– “Joystick and manual control interface”
** CONDITION **
The system always been under Service contract until December 2024
Software upgraded to version 3.6.3, running on Windows XP.
System in cold idle since early 2025.
Reported in perfect working condition until that time.
No chiller included.
