Prisma E
The core instrument (Prisma E) includes:
– Workstation with Windows 10
– 1 x 24’’ Widescreen LCD Monitor
– xT Software
– W Column
– 110 x 110 mm Eucentric Stage
– Multi-sample SEM Holder
– CCD IR Camera
– SE Detector (ET-SED)
– Low-Vacuum SED (LVD, GSED)
– ESEM
– Table Top with Support
Maps 3 for SEM
Scroll Pre-vacuum Pump Kit
Lens-mounted DBS Detector
EDS UltraDry 129 eV 30
ColorSEM
In-Chamber Nav-Cam
The Prisma E can be freely and simply switched between three vacuum modes, which enables investigation of conductive, non-conductive and high-vacuum incompatible materials:
– High-vacuum mode (<6*10-4 Pa) for imaging and microanalysis of conductive and/or conventionally prepared specimens;
– Low-vacuum mode (10 to 130 Pa) for imaging and microanalysis of non-conductive specimens without preparation;
– ESEM™ mode (10 to 4000 Pa) for high-vacuum incompatible specimens which are impossible to investigate with traditional EM methods.
Sample Navigation
Prisma E equipped with a 5-axes motorized x-y-z-t-r stage, providing movements:
– X and Y range: 110 mm (motorized); Z range: 65 mm (motorized)
– Tilt: -15 to +90 degrees (motorized)
– Eucentric tilt
– A unique standard specimen holder with labeled positions and unique stage mounting, allowing simultaneous loading of 18 standard samples ( 12 mm) or 6 large samples ( 25 mm). Positions are predefined in the UI for easy navigation.
Source Tungsten hairpin filament. This is mounted within a tetrode gun assembly and has 256 gun bias positions. It is fully automatically switched to keep constant emission over the full high tension range.
Voltage 200 V to 30 kV
Beam Current Up to 2 µA
Resolution (optimal working distance)
High-vacuum mode:
– 3.0 nm at 30 kV (SED)
– 8.0 nm at 3 kV (SED)
High-vacuum mode with Options:
– 4.0 nm at 30 kV (with optional BSED)
– 7.0 nm at 3 kV (requires optional Beam Deceleration Mode plus optional BSED)
Low-vacuum mode:
– 3.0 nm at 30 kV (SED)
– 10.0 nm at 3 kV (SED)
Low-vacuum mode with Options:
– 4.0 nm at 30 kV (with optional BSED)
Extended vacuum mode (ESEM):
– 3.0 nm at 30 kV (SED)
