MAIN FEATURES
RESOLUTION
• High vacuum
– 3.0 nm at 30 kV (SE)
– 4.0 nm at 30 kV (BSE)*
– 8.0 nm at 3 kV (SE)
• High vacuum with beam deceleration option
– 7.0 nm at 3 kV (BD mode* + vCD*)
• Low vacuum
– 3.0 nm at 30 kV (SE)
– 4.0 nm at 30 kV (BSE)*
– 10 nm at 3 kV (SE)
• Extended vacuum mode (ESEM)
– 3.0 nm at 30 kV (SE)
DETECTORS
Everhardt Thornley SED (secondary electron detector)
• Large Field Low vacuum SED (LFD)
• Gaseous SED (GSED) (used in ESEM mode)
• High sensitivity low kV SS-BSED*
• IR camera for viewing sample in chamber
• Gaseous BSED (BSE detector for high pressures, used in ESEM
mode)*
• 4 quadrant solid-State BSED* TBD
• Scintillator BSED/CLD* TBD
• vCD (low voltage high contrast detector)* TBD
• Electron beam current measurement*TBD
• Gaseous analytical BSED (GAD)* TBD
STAGE
• X-Y = 100 mm
• Z = 60 mm
• Z clearance = 75 mm
• T = – 5° to + 70°
• R = 360° continuous
• Repeatability: 2 µm (x and y)
• Tilt-eucentric at 11.3 mm mounting height for all working distances
• x and y movements are in the tilt plane
10 mm analytical WD
ACCESSORIES
Support PC
Manual User Interface
Joystick
