** MAIN FEATURES
Continuously Variable Accelerating Voltage Over the range 0.2 – 30 kV. Image rotation and focus automatically compensated over the full range.
Continuously Variable Beam Current Control Maximum beam current: > 1 µA at 30 kV. 10 pre-calibrated values (spotsizes) and choice of automatic coupling of spotsize to magnification
** RESOLUTION
3.5 nm at 30 kV, 25 nm at 1 kV
** DETECTORS
Specimen Chamber CCD camera fully integrated in SEM control software
ELECTRON DETECTION
Basic Detection Modes Secondary electrons with high efficiency longlife scintillator equipped Everhart-Thornley SE detector. Automatic control of contrast and brightness. Grid bias control continuous from – 150 V to +300V. Backscattered electrons with 19 mm solid state back-scatter detector with two-segment switching
** STAGE
Standard motorized stage
Multiple stub holder, pretilt holder, adjustable clamp, and analytical holders for 25mm and 32mm mounts
Eucentric Goniometer Stage 4 axis motorised stage (X,Y,R,Z) with full manual override. Integrated read-out on-screen of all movements for motorised stage. Tilt setting continuously monitored through microscope control software. Motorised stage supported by extensive software capability including user coordinates, Compucentric rotation and up to 3 point specimen alignment. Tilt eucentric working distance at 10 mm with optimum detector geometries.
CompEucentric Stage Movement Computerised stage control compensates the off centre rotation for any point of interest. This allows quick and convenient viewing of the same point of interest at any angle of rotation.
Specimen Movements X =50 mm, Y = 50 mm, Rotation = 360° continuous. Tilt range -15°‚ to +75°, for large specimens 0° to +45°. Z movement: 50 mm total. Max. clearance 75 mm.
Specimen Exchange Drawer type entry, operating vacuum regained <2.5 minutes (if vented with dry nitrogen). Automatic vacuum interlock.
Sample Chamber Dimensions Inside chamber diameter 284mm
** ACCESSORIES
Cold Stage and Hot stage available as options
** VACUUM SYSTEM
Turbo-Molecular Pumping System End pressure < 5.10 –4 Pa (< 5.10-6 mBar) after 24hr pumping. Edwards TMP. Edwards pre-vacuum rotary pump. Penning gauge standard
