** MAIN FEATURES
The Tescan Vega 2 TS 5130 is a versatile scanning electron microscope (SEM) designed for high-resolution imaging across various vacuum environments. It offers a magnification range from 4× to 500,000×. The system is ideal for applications in biosciences, materials science, electronics, and semiconductors, where detailed surface and compositional analysis is essential. It supports multiple electron optics working modes such as Resolution, Depth, Field, and Fish Eye.
** BEAM
Emitter Type: Tungsten heated cathode
Acceleration Voltage Range: 500 V to 30 kV
Probe current 1 pA to 2 µA
** RESOLUTION
High Vacuum (SE): 3.0 nm
** DETECTORS
SED
BSED (retractable)
NavCam
Large Chamber.
no analytic included (no EDX, no EBSD)
** STAGE
Fast and precise motorised specimen stages
** OTHER
Scanning speed Focus window: From 600 ns to 10 ms per pixel adjustable in steps or continuously Shape, size and position continuously adjustable
Image size: Up to 4 096 x 4 096 pixels, adjustable separately for live image (in 4 steps) and for stored images
(9 steps), selectable square or 3:4 rectangle
Microscope control: All microscope functions are controlled by means of PC via the Vega TC program using MS Windows platform
Remote control: Via TCP / IP
Automatic procedures: Vacuum control, Filament heating, Gun Alignment, Compensation for kV, Probe Current optimized for Spot Size, Spot Size optimized for Magnification, Scanning Speed, Contrast and Brightness, Focus and Stigmator, Look up Table