** MAIN FEATURES **
** BEAM **
FEG electron source Schottky thermal field emitter
Beam voltage 80 to 200 kV
** RESOLUTION **
DEPENDING ON AMBIENT CONDITIONS OF THE SITE
Point resolution 0.27 nm
Line resolution 0.144 nm
Information Limit 0.18 nm
** DETECTORS **
None
** STAGE **
X and Y range 2 mm
Z range 750 µm
α tilt range -80 to +80°
** ACCESSORIES **
None
User interface Windows XP® GUI
Scripting allowing remote control
