MAIN FEATURES
RESOLUTION
esolution @ optimum WD (high vacuum)
– 1.0 nm at 15 kV (TLD-SE)
– 1.6 nm at 1 kV (TLD-SE)
– 0.8 nm at 30 kV (STEM)
• Resolution @ optimum WD (low vacuum)
– 1.5 nm at 10 kV (Helix detector)
– 1.8 nm at 3 kV (Helix detector)
DETECTORS
• In-lens SE detector (TLD-SE)*
• In-lens BSE detector (TLD-BSE)*
• Everhardt-Thornley SED*
• Low vacuum SED (LVD)*
• IR-CCD*
• UHR low vacuum SED (Helix detector)
• STEM
STAGE
• Eucentric goniometer stage
• X = 50 mm
• Y = 50 mm
• Z = 50 mm (25 mm motorized)
• T = -15° – + 75° (manual, motorized optional)
• R = 360° continuous
• Repeatability: 2 μm
ACCESSORIES
Manual Control Panel, Cryo Pump
