** MAIN FEATURES **
JEOL JSM-7401F field emission SEM for high-resolution nanoscale imaging in materials science and semiconductor research with in-lens objective for ultrahigh resolution.
** BEAM **
– Field emission gun (FEG), cold FEG
– Acceleration voltage 0.1 to 30 kV
** RESOLUTION **
– 0.8 nm at 15 kV
– 1.6 nm at 1 kV
** DETECTORS **
– Standard SE detector
– In-lens SE detector
– Gentle beam imaging mode
– No EDS detector installed, but support EDS addition.
** STAGE **
– Standard JEOL SEM stage
– 5-axis motorized stage
– X/Y travel approx. 100 mm
– Tilt −5 to +70 degrees
** ACCESSORIES **
– LN2 dewar / cold trap
– Two turbomolecular pumps on column
– Dual-monitor PC workstation
– Optional low-kV imaging mode
