note: EDS is not included
** MAIN FEATURES **
SEM used for science of material.
EVO MA 25 Scanning Electron Microscope
Column with 3 electromagnetic lenses, 3 final diaphragms
** BEAM **
– Type of emitter : LaB6 or Tungsten
– Acceleration voltage range : 200V to 30kV
** RESOLUTION **
– Resolution 2.0 nm @ 30 kV
– Resolution 10 nm @ 3kV
– Resolution 15 nm @ 1 kV
– Magnification 5 to 1,000,000X
– Electron optics management via Optibeam software for optimum resolution
** DETECTORS **
– New generation Everhart-Thornley detector located in the chamber, optically coupled to the photomultiplier tube.
– BSD HD detector, fixed 5 quadrants (LREM) Backscattered electron detector clipped under the HD objective lens LM 5SBSD-1kV 16 mm low voltage diode.
– C2D Detector: Partial vacuum (PV) secondary electron detector for EVO 10, 15, and 25. High-performance cascade current detector in partial vacuum. The C2D is a high-performance secondary electron detector designed for use in partial vacuum environments. It is compatible with EVO 10, 15, and 25 models.
– Infrared cameras (X2) : Infrared camera installed in the microscope chamber and attached to the chamber door and one other at 45° in chamber
** STAGE **
Vacuum, chamber, and stage:
– Air cooling of the microscope
– A two-stage rotary primary pump
– Two hydrocarbon-free turbomolecular pumps to prevent any contamination
– Vacuum measurement by Penning gauge located in the chamber
– Door opening via slide system, 3 ports available on the door
– Cylindrical chamber with an internal diameter of 420 mm and height of 330 mm, equipped with 11 ports for accessories.
– 5-axis motorized stage: 130 mm (X), 130 mm (Y), 50 mm (Z), -10° +90° (T), 360° (R)
– Acceptable sample dimensions: diameter 300 mm, height 210 mm (without ZTR)
– Large Z 80mm motorized module
Variable Pressure Mode:
– Variable Pressure Mode from 10 to 400 Pa of air or nitrogen
– “easyVP” mode up to 133 eV without changing the position of the diaphragm and detectors.
** ACCESSORIES **
– LaB6 Wehnelt
– W Wehnelt
– SE detector
– BSE detector (HD 5 cadrans)
– CD2 detector for low-vacuum observations
– door camera with NavCAM function
– front chamber camera
– 45° chamber camera
– ZRT stage
– ortho stage
– extension stage
– correlative optical / SEM sample holder
– large sample holder
– small sample holder
– Stub carroussel
– EATON voltage inverter
– dry rotary pump
– quite vacuum mode
– Vib&Tec duo anti-vibration system
note: EDS probe not included
** HISTORY **
The SEM is currently in operation.
The system has always been under a ZEISS Premium maintenance contract.
All the maintenance certificates are available.
** AVALABILITY **
Available now
