MAIN FEATURES
RESOLUTION
• 3.5 nm @ 30 kV High vacuum mode
• 3.5 nm @ 30 kV ESEM™ mode
• 15 nm @ 3 kV Low vacuum mode
DETECTORS
Detectors:
• Everhardt Thornley SED*
• Large Field Gaseous SED*
• Gaseous SED*
• IR-CCD*
• Solid-State BSED
• Gaseous Analytical BSED
• Centaurus BSED/CLD
• Gaseous BSED
(*=standart)
STAGE
Pseudo-Eucentric goniometer stage
• x = 100 mm
• y = 100 mm
• Z = 60 mm
• T = -5° – +70° (WD dependent)
• R = 360° continuous
ACCESSORIES
Manual Control Panel
