Main features :
RESOLUTION
• High-vacuum
– 0.8nm at 30kV (optional STEM)
– 1.2nm at 30kV (SE)
– 2.5nm at 30kV (BSE)
– 3.0nm at 1kV (SE)
• Low-vacuum
– 1.5nm at 30kV (SE)
– 2.5nm at 30kV (BSE)
– 3.0nm at 3kV (SE)
• Extended vacuum mode (ESEM)
– 1.5nm at 30kV (SE)
• Accelerating voltage: 200V – 30kV
• Probe current: up to 100nA –
continuously adjustable
STAGE
100x100mm DC stage
Z = 60mm (Z – clearance 75mm)
10mm analytical WD
• T = -5° – to +70° (WD dependent)
• R = 360° continuousy
Hot and cold stage
DETECTORS:
SED – Secondary Electron Detector
SSBSED – Solid State Backscattered Detector
GAD – Gaseous Analytical Detector
LFD – Large Field Detector
