** MAIN FEATURES **
This field emission scanning electron microscope (FE-SEM) was used for inspection of semiconductors, defects, cross-sections, lithography, contamination, failure localization.
** BEAM **
Type of emitter: FEG, factory pre-centered filament
Acceleration voltage range: 0.3 kV to 30 kV
** RESOLUTION **
HV (high vacuum) mode: 3.0 nm at 30 kV, 8.0 nm at 3 kV, 15 nm at 1 kV
LV mode: 4.0 nm at 30 kV
** DETECTORS **
Built-in EDS (JED-2300)
Image storage / display: frame store at 640×480, 1280×960, 2560×1920
Multi-image display (2,4), pseudo-colour, digital zoom, dual magnification, automatic image archiving, “Smile View”
Secondary electron, composition (mixing/signal contrast), topography, shadowed imaging modes
** STAGE **
Large eucentric type, full 5-axis motor control
Specimen exchange through loadlock
Maximum specimen size: Ø 100 mm diameter
** ACCESSORIES **
Computer/control: PC / IBM PC/AT compatible, OS Windows XP, monitor (15″ LCD or dual), Ethernet network
Vacuum/pumping: fully automated pumping, differential pump (DP) and rotary pump(s) (RP) (1 or 2)
Switching vacuum mode via menu (<1 minute)
LV pressure range: 1 to 270 Pa
** CONDITION **
Not working, possible IGP issues
Was under an OEM service contract.
