** BEAMS **
Electron source Schottky thermal field emitter
Beam voltage
SEM 200 V – 30 kV
** RESOLUTION **
Visual resolution @ 3 kV LoVac: 3.5 nm
Visual resolution @ 30 kV HiVac: 2 nm
** DETECTORS **
ETD (chamber)
BSD (chamber)
** STAGE **
X and Y -25 to +25 mm
Z 25 + 25 mm (mechanical and motorized)
R 360°
Tilt -15° to +75°
Eucentric, no clamp
Weight 1000 g at 0° tilt, 250 g otherwise
** ACCESSORIES **
Micro manipulator: Omniprobe 200 Support PC
** OTHER **
ESEM vacuum
User interface Windows 2000® GUI
** CONDITION OBSERVATION **
System in perfect condition
FEG tip will be changed
