** MAIN FEATURES **
The FEI NanoNova 430 FEG-SEM, installed in 2009, is a high-resolution analytical field emission scanning electron microscope designed for materials science, geoscience, and semiconductor research. It combines advanced imaging and analytical capabilities, including SE, BSE, EDS, and CL detection, with both high and low vacuum operation. The instrument supports uncoated and non-conductive samples, making it suitable for geological specimens and other complex materials.
** BEAM **
– Field Emission Gun (FEG) electron source
– Acceleration voltage range: 0.5 kV to 30 kV
– Beam current: up to 10 nA (High-Resolution Mode), up to 22 nA (Analytical Mode)
– Magnetic immersion lens with through-the-lens “immersion mode” imaging
– Deceleration mode for surface-sensitive imaging
** RESOLUTION **
– Spatial resolution: 3–4 nm under optimal conditions
** DETECTORS **
– Everhart-Thornley Detector (Secondary Electrons)
– Solid-State BSED (High Vacuum)
– In-Lens SE (TLD SE) and In-Lens BSE (TLD BSE) detectors
– Gatan Chroma CL detector (400–800 nm) for colored cathodoluminescence imaging
– Dual Bruker EDS detectors (30 mm² each) for X-ray microanalysis and mapping
– Low Vacuum SE detectors (Helix Detector and LVD) for imaging uncoated samples
– IR-CCD camera for in-chamber viewing
** STAGE **
– Large chamber with 5-axes motorized stage (X, Y, Z, Tilt, Rotation)
– Working distance: 5–12 mm
– Accommodates large and irregular samples
** ACCESSORIES **
– Chiller
– Roughing pump
– Oil-free vacuum system
** CONDITION **
– Always maintained under active FEI service contract
– No known operational issues reported
– System in good working condition
