FEI Helios NanoLab 600 FIB-SEM Dual Beam Electron Microscope

** BEAM **
– Schottky FE mounted on the NG hot swap gun module
– Gallium Liquid Metal
– 1000 h
– ELSTAR
– Sidewinder
– Electron Column
– ION Column
** RESOLUTION **
Optional WD
– 0.9 nm at 15 kV
– 1.4 nm at 15 kV
Coincident WD:
– 1 nm at 15 kV
– 1.6 nm at 5 kV
– 2.5 nm at kV
– 5 nm at 30 kV
Magnification: 69x-2300000x
** STAGE **
5 axes motorized XYZRT
6” UHR stage with piezo control
– X/Y = 150mm
– Z = 0-20mm
– T = -10⁰ – +60⁰
** DETECTORS **
– Through-lens detection (TLD) for SE and BSE
– STEM Detector – retractable
**ACCESSORIES **
– Omniprobe: Autoprobe 200
– Plasma Cleaner: Ibss Group GV10x