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SEM Upgrades
Activity monitor
Activity monitor
* For detailed information and preventive maintenance
* Automatic acquisition and complression of microscope operation parameters
* 16x 16-bit analog signal inputs, and software API for loggin events
* Live and offline viewer with PDF exoport
* USB 2.0 controlled and integrated with the new microscope control software -
Upgrade Options
microCal
Easy-to-handle and automated geometric calibration of your microscope with 3D calibration samples. 3D measurement data of marker-based calibration structures are automatically analysed and compared to the provided reference data. Calculation and documentation of scales, shear factors and remaining non-linear errors in all three spatial dimensions.
* One Step: Simultaneous processing of lateral and vertical calibration parameters (scale, shear)
* One Model: Determination of coupling (shear) between vertical and lateral axes
* One Click: Due to advanced image processing and statistical methods, calibration is extremely efficient and accurate
* One Reference: Software and calibration structures are suitable for different measurement devices
[The calibration structures and the calibration software were developed by m2c].Applied calibration parameters
* 3 scale factors for the co-ordinate axes
* 3coupling factors for coupling between all co-ordinate axes (orthogonal deviation)
* Remaining non-linear errors in all three spatial dimensionsFeatures and functions
* Automated calibration due to advanced image processing algorithms, including detection of sample orientation and sub-pixel co-ordinate measurement
* Reliable processing of calibration parameters due to advanced statistical methods (including leastsquares methods and outlier detection)
* Mathematical and graphical accuracy analysis
* Results and settings are saved into a project file
* Integrated export functions for PDF protocol files or for ASCII data (for further use)
* Calibration parameters are saved for data correction of all further measurements performed by the customer’s microscope
* Different SPM/3D file formats and import filters for ASCII and image data files are included -
Upgrade Options
microShape
Using a 4-quadrant backscatter electron (4Q BSE) detector, generating 3D data with microShape is quick and simple: it takes a few seconds to create and visualize the topography of your samples. Enhance the capabilities of your SEM with microShape and make use of the following advantages:
* 3D visualization of sample surface (topography)
* profile views
* 3D coordinates and height differences
* calculate spatial distances and angles
In order to obtain quantitative 3D data, a calibration of your SEM and your 4Q BSE detector is required. We recommend our 3D calibration structures and our calibration software microCal.The calibration structures are specifically developed for SEM 3D calibration due to their spatially distributed nanomarker for scale calibration and their micro-hemisphere for detector calibration. The Software algorithms automatically compare the measured nanomarker coordinates to the specific reference coordinates of your 3D calibration structure and calculate scale factors in all spatial directions. These calibration factors can the be used to correct further measurements.
[The calibration structures and the calibration software were developed by m2c].
Basic functions
3D and map view of topography data with various options for rendering and coloured views
* Rotate, shift, zoom and scale data
* Measure and save heights, 3D coordinates, spatial distances, and angles
* Measure and view profiles, save profile data as PDF report, ASCII, CSV, or image data
* 3D data processing (rotate data, change resolution, extract ROIs, calculate histogram)
* Calculate difference, sum, and mean of topographic data
* Calculate surface parameters (spherical and polynomial approximation)
* Add texture (e.g., from SE image or EDS mapping)
* Apply 3D data correction (scale and shear factors for lateral and height correction)
* Save rendered 3D views, maps, and ROIs
* Export topography data for further processing or analysis (ASCII, BCR, Al3D, Surfer DAT, 8/16-bit TIFF)
* Export topography for 3D print (PLY format)
* Export texture (ASCII, TIFF, JPG, PNG, BMP)
* Import of topography data (ASCII, 8/16-bit TIFF)3D reconstruction plugin
* 3D reconstruction of topography data from four images of a segmented BSE detector (with shape -from-shading)
* Calculate topography independent backscatter values and gradients and view as texture
* Apply geometric scan corrections
* Apply lateral and height scale correction (presumes 3D calibration)
* Free configurable detector geometry (WD correction for different height mounting, radial distance, mounting angle)
* Import of common SEM image file formats -
SEM Upgrades
SEM control software
SEM control software
* Control of coils and detectors
* Display of measured values
* Load and save of SEM parameters
* Auto-function for focus/stigmator and brightness/contrast
* TV scan, slow scan, mapping, line scan, point measurements
* Reduced area scan with zoom
* AVI-function with time lapse
* Configurable image acquisition functions for routine actions: Scan buttons can be added, configured and labeled * so as signal sources, image resolution, image format
* Integrated vacuum-controller, visualization of vacuum scheme
* Integrated sample stage controller – preset, load and save sample- and stage positions
* Signal monitor with live gradation-curve
* Display and setting of ir-chamberscope
* Integrated image processing software
* Live 3D reconstruction with BSE-detector (optional)
* AutoSEM for automated capture of multiple sample locations (optional)
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