MAIN FEATURES
RESOLUTION
• High vacuum imaging, optimum WD
– 0.8 nm at 30 kV (STEM)
– 1.0 nm at 15 kV (TLD-SE)
– 1.4 nm at 1 kV (TLD-SE) without beam deceleration
– 3.5 nm at 100 V (DBS)
• High vacuum analysis, analytical WD
– 3.0 nm at 15 kV and 5 nA (TLD-SE)
• Low vacuum imaging, optimum WD
– 1.5 nm at 10 kV (Helix detector)
– 1.8 nm at 3 kV (Helix detector)
DETECTORS
• In-lens SE detector (TLD-SE)
• In-lens BSE detector (TLD-BSE)
• Everhardt-Thornley SED
• Low vacuum SED (LVD)
• IR-CCD
• High sensitivity low kV Directional Backscattered Detector (DBS),
lens-mount* or retractable*???tbd
• TV-rate low vacuum solid-state BSED (GAD)*???tbd
• UHR low vacuum SED (Helix detector)*???tbd
STAGE
Type : Eucentric goniometer stage, 5-axes motorized
XY: 110x110mm DC motors
Repeatability < 2.0 µm (@0° tilt)
Z : 25 mm
R: nx360°
Tilt: -15°/+75°
Max. sample height Clearance 60 mm to eucentric point
Max. sample weight 500 g in any stage position
(up to 2 kg at 0°tilt)
Max. sample size Ø150 mm with full rotation (larger samples possible with limited rotation)
Analytical working distance: 5 mm
ACCESSORIES
GIS carbon
GIS platinum
Plasma cleaner
