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Spare parts
Brooks Front end
Manufacturer: Brooks Automation Software Corp.
Product condition: Foiled or Crated
Vintage:Price: click here for enquiry
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Spare parts
CDM preamp
Manufacturer: FEI
Product condition: Deinstalled (re-installation possible)
Vintage:Price: click here for enquiry
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Spare parts
EDWARDS XDS10 Scoll pump
Manufacturer: EDWARDS
Product condition: Foiled or Crated
Vintage:Price: click here for enquiry
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Spare parts
Expida STAGE 300mm
Manufacturer: FEI
Product condition: Deinstalled (re-installation possible)
Vintage:Price: click here for enquiry
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Spare parts
Expida transport tool and crates
Manufacturer: FEI
Product condition: Foiled or Crated
Vintage:Price: click here for enquiry
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Spare parts
GIS module
Manufacturer: ZEISS
Product condition: Foiled or Crated
Vintage:Price: click here for enquiry
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Spare parts
IDE IEC-3 air isolator
Manufacturer: IDE
Product condition: Deinstalled (re-installation possible)
Vintage:Price: click here for enquiry
