MAIN FEATURES
Beam performance
< 3 nm @ 1 kV, 2 mm WD
< 3 nm @ 5 kV, 5 mm WD
< 3 nm @ 30 kV, 7 mm WD
Detectors
SED
CDEM
TLD
50x50mm Stage
repeatability with Ebeam at 0° tilt : X<1µm; Y<1µm
repeatability with Ibeam at 52° tilt : X<2µm; Y<2µm
Accuracy : with Ebeam at 0° tilt : X<2µm; Y<2µm
Accuracy : with Ibeam at 52° tilt : X<4µm; Y<4µm
GIS
XeF2 (IEE)
WD for EDX: 5mm
Vacuum
10-6 mbar range after 24H of pumping
